Takafumi Oki

Title: Takafumi Oki: Innovator in Substrate Processing Technology

Introduction

Takafumi Oki is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 2 patents. His innovative work focuses on the use of vacuum ultraviolet rays for substrate exposure methods.

Latest Patents

Takafumi Oki's latest patents include an exposure device substrate processing apparatus and an exposure method of substrate. In his first patent, vacuum ultraviolet rays are emitted to a surface of a substrate by a light source. During the emission period, part of the vacuum ultraviolet rays is received by an illuminometer, which measures the illuminance of the received rays. The light receiving surface of the illuminometer is positioned at a constant height based on the substrate's surface. The exposure amount of the substrate is calculated based on the measured illuminance, and the emission of vacuum ultraviolet rays is stopped based on this calculated exposure amount.

In his second patent, the atmosphere in a processing chamber is discharged by a suction device. When the oxygen concentration in the chamber is lowered to a predetermined exposure starting concentration, the emission of vacuum ultraviolet rays begins. This emission is halted once the exposure amount reaches a predetermined set exposure amount. The exposure starting concentration is defined to be higher than 1% and lower than the oxygen concentration in the air, ensuring that ozone generated does not damage the film on the substrate's surface.

Career Highlights

Takafumi Oki is associated with Screen Holdings Co., Ltd., where he continues to develop innovative technologies in substrate processing. His work has been instrumental in advancing the efficiency and effectiveness of exposure methods in various applications.

Collaborations

Some of his notable coworkers include Yuji Tanaka and Chisayo Nakayama, who contribute to the collaborative efforts in research and development within the company.

Conclusion

Takafumi Oki's contributions to substrate processing technology through his patents demonstrate his commitment to innovation in the field. His work continues to influence advancements in the industry, showcasing the importance of research and development in technology.