Company Filing History:
Years Active: 2015
Title: Takafumi Chida: Innovator in Electron Microscopy and Vacuum Processing Technologies
Introduction
Takafumi Chida is a notable inventor based in Chigasaki, Japan. He has made significant contributions to the fields of electron microscopy and vacuum processing technologies. With a total of 2 patents, his work has advanced the efficiency and effectiveness of defect inspection methods and vacuum processing apparatuses.
Latest Patents
Chida's latest patents include a "Defect inspection method and device therefor." This invention focuses on improving the imaging process of samples using an electron microscope. By reducing the scanning range of the Z coordinate, the time required for focusing is minimized. The method involves obtaining SEM images from a predetermined number of portions, estimating the curved surface shape of the sample, and narrowing the scanning range based on this information to enhance image quality.
Another significant patent is the "Vacuum processing apparatus and operating method of vacuum processing apparatus." This invention features a complex system that includes an atmospheric transfer chamber, a lock chamber, and multiple vacuum transfer chambers. The design allows for efficient wafer transfer and processing, with a control unit managing the operation of gate valves to streamline the process.
Career Highlights
Chida is currently employed at Hitachi High-Technologies Corporation, where he continues to innovate and develop advanced technologies. His work has been instrumental in enhancing the capabilities of electron microscopy and vacuum processing systems.
Collaborations
Throughout his career, Chida has collaborated with esteemed colleagues such as Susumu Tauchi and Hideaki Kondo. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Takafumi Chida's contributions to the fields of electron microscopy and vacuum processing are noteworthy. His innovative patents reflect his commitment to advancing technology and improving processes in these critical areas.