Company Filing History:
Years Active: 2020-2025
Title: Taide Tan: Innovator in Substrate Processing Technology
Introduction
Taide Tan is a prominent inventor based in Tigard, OR (US), known for his contributions to substrate processing technology. He holds a total of 7 patents, showcasing his innovative approach to engineering solutions in the field.
Latest Patents
One of Taide Tan's latest patents is an integrated showerhead with thermal control designed for delivering radical and precursor gas to a downstream chamber. This invention enables remote plasma film deposition. The substrate processing system includes a first chamber with a substrate support. A showerhead is positioned above the first chamber, configured to filter ions and deliver radicals from a plasma source. The showerhead features a heat transfer fluid plenum, a secondary gas plenum with an inlet for secondary gas, and multiple secondary gas injectors to introduce the secondary gas into the first chamber. Additionally, it contains several through holes that do not communicate with the heat transfer fluid plenum or the secondary gas plenum.
Career Highlights
Taide Tan is currently employed at Lam Research Corporation, where he continues to develop innovative technologies that enhance substrate processing. His work has significantly impacted the efficiency and effectiveness of plasma deposition processes.
Collaborations
Throughout his career, Taide has collaborated with notable colleagues, including Huatan Qiu and Rachel E Batzer, who contribute to the innovative environment at Lam Research Corporation.
Conclusion
Taide Tan's work exemplifies the spirit of innovation in substrate processing technology. His patents and collaborations reflect a commitment to advancing engineering solutions in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.