Company Filing History:
Years Active: 2008-2009
Title: Innovations of Tai-hyoung Kim in Chemical Mechanical Polishing
Introduction
Tai-hyoung Kim, an accomplished inventor based in Yongin-si, South Korea, has made significant contributions to the field of semiconductor manufacturing. With two patents to his name, his innovations have advanced technologies that are vital for the production of integrated circuits.
Latest Patents
Kim's recent patents revolve around chemical mechanical polishing (CMP) devices, emphasizing a pad conditioner assembly and a polishing pad conditioning method. The CMP device is engineered to planarize a wafer through the rotation of a carrier, which holds the wafer on its lower surface. This process involves a rotating polishing table where slurry is supplied onto a polishing pad affixed to the upper surface. A distinctive feature of his patent is a pad conditioner assembly that enhances the polishing pad's performance by delivering a pad conditioning liquid while simultaneously applying megasonic vibrations. This dual-action method effectively removes contaminants from the polishing pad’s surface.
Additionally, one patent focuses on innovative methods for fabricating semiconductor devices utilizing organic compounds and a fluoride-based buffered solution. This method outlines a sequence of steps that include the formation of metal interconnections, contact holes, and molding layers, ultimately leading to the creation of a trench on the semiconductor substrate followed by a wet etching process.
Career Highlights
Tai-hyoung Kim is currently employed at Samsung Electronics Co., Ltd., a global leader in technology and innovation. His expertise in semiconductor technologies has not only bolstered his standing within the company but has also contributed to advancements in the industry as a whole.
Collaborations
Kim has collaborated with notable colleagues, including Moo-yong Park and Choon-Goang Kim. Their collective efforts and expert knowledge have further strengthened the development of innovative solutions in semiconductor manufacturing at Samsung.
Conclusion
Tai-hyoung Kim exemplifies the spirit of innovation in the semiconductor industry. His patents in chemical mechanical polishing devices and fabrication methods have established new benchmarks in technology. The collaborative environment at Samsung Electronics Co., Ltd. enables inventors like Kim to thrive, driving advancements that shape the future of semiconductor manufacturing.