This inventor holds 2 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 1999-2000.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Kyungki-do, KR (1999)
- Kyonggi-do, KR (2000)
Company Filing History:
Years Active: 1999-2000
Title: Tae-hyung Lim: Innovator in Plasma Processing Technology
Introduction
Tae-hyung Lim is a notable inventor based in Kyonggi-do, South Korea. He has made significant contributions to the field of plasma processing technology, holding 2 patents that showcase his innovative approach to semiconductor manufacturing.
Latest Patents
One of his latest patents is for a plasma processing apparatus protected from discharges in association. This invention addresses the issue of arcing to the gas distributor plate caused by secondary potentials generated by polymers adhering to it. The gas distribution plate is electrically isolated from the ground electric potential and does not have any polarity. It can be formed of an insulating material, allowing for easier maintenance by enabling the separation of the gas distribution plate from the apparatus to remove accumulated polymers during the plasma process.
Another significant patent is for a pedestal with a self-retaining sealing ring for semiconductor devices. This pedestal includes a body with a circumferential recess and a sealing ring that mates with the recess. The sealing ring features a radially inwardly-extending projection that fits within the cutaway area of the recess, ensuring it remains in place even when the mounted wafer is removed. This design enhances the efficiency of the etching system.
Career Highlights
Tae-hyung Lim is currently employed at Samsung Electronics Co., Ltd., where he continues to develop innovative solutions in semiconductor technology. His work has contributed to advancements in the efficiency and reliability of plasma processing systems.
Collaborations
He has collaborated with notable coworkers, including Sang-ho Kim and Chang-sik Kim, who have also contributed to the field of semiconductor technology.
Conclusion
Tae-hyung Lim's contributions to plasma processing technology through his patents reflect his commitment to innovation in the semiconductor industry. His work at Samsung Electronics Co., Ltd. continues to influence advancements in this critical field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile