Tadayuki Sugimori

Title: Tadayuki Sugimori: Innovator in Pattern Inspection Technology

Introduction

Tadayuki Sugimori is a notable inventor based in Setagaya-ku, Japan. He has made significant contributions to the field of pattern inspection technology. His innovative work has led to the development of advanced apparatuses that enhance the accuracy and efficiency of pattern inspections.

Latest Patents

Sugimori holds a patent for a "Pattern inspection apparatus and pattern inspection method." This invention includes a secondary electron image acquisition mechanism that utilizes a deflector to deflect multiple primary electron beams. The apparatus is designed to acquire secondary electron images corresponding to each primary electron beam by scanning a target object with a pattern. The technology also features a storage device for individual correction kernels, which are used to adjust the secondary electron images to align with a reference pattern.

Career Highlights

Tadayuki Sugimori is currently employed at Nuflare Technology, Inc., where he continues to innovate in the field of pattern inspection. His work has been instrumental in advancing the capabilities of inspection technologies, making them more reliable and effective.

Collaborations

Sugimori has collaborated with notable colleagues, including Masataka Shiratsuchi and Chosaku Noda. These partnerships have contributed to the development of cutting-edge technologies in the industry.

Conclusion

Tadayuki Sugimori's contributions to pattern inspection technology exemplify his dedication to innovation. His patent and ongoing work at Nuflare Technology, Inc. highlight his role as a key figure in advancing this important field.