Location History:
- Kakogawa, JP (2002 - 2003)
- Hyogo, JP (2003 - 2013)
Company Filing History:
Years Active: 2002-2013
Title: Tadao Uehara: Innovator in Semiconductor Manufacturing
Introduction
Tadao Uehara is a prominent inventor based in Hyogo, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 6 patents. His innovative methods have advanced the technology used in semiconductor devices, showcasing his expertise and dedication to the industry.
Latest Patents
Uehara's latest patents include a method of manufacturing semiconductor devices. This method involves a semiconductor wafer with a main surface that includes a device chip area, a peripheral area, and a blank area. The process consists of coating the entire main surface with a positive photosensitive resist, defining an additional exposure area, and conducting multiple exposure processes to create a resist pattern. This pattern is then used for dry-etching the main surface of the semiconductor wafer.
Another notable patent is a chemical mechanical polishing method. This method includes forming interlayer insulating films to coat projecting patterns on substrates. It involves a flattening process and obtaining a linear approximation formula that expresses the relationship between area ratios and polishing time. This innovative approach enhances the efficiency of achieving target film thicknesses during the polishing process.
Career Highlights
Tadao Uehara is currently associated with Ricoh Company, Ltd., where he continues to develop cutting-edge technologies in semiconductor manufacturing. His work has not only contributed to the company's success but has also influenced the broader industry.
Collaborations
Uehara has collaborated with notable coworkers, including Shohji Hayashi and Masanori Miyata. Their combined expertise has fostered an environment of innovation and creativity, leading to advancements in semiconductor technology.
Conclusion
Tadao Uehara's contributions to semiconductor manufacturing through his patents and collaborations highlight his role as a key innovator in the field. His work continues to impact the industry positively, paving the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.