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Tadao Tanaka

USPTO Granted Patents = 3

Average Co-Inventor Count = 3.6

ph-index = 2

Forward Citations = 5(Granted Patents)

Location History:

Kosyoku, JP (2004)
Chikuma, JP (2014)
Iiyama, JP (2015)

Company Filing History:

Shin-etsu Handotai Co., Ltd.

Years Active: 2004-2015

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9108289 - Double-side polishing apparatus (2015-08-18),

2. 8834230 - Wafer polishing method and double-side polishing apparatus (2014-09-16),

3. 6764392 - Wafer polishing method and wafer polishing device (2004-07-20),

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