Company Filing History:
Years Active: 1985
Title: Tadao Suganuma: Innovator in Charged Particle Beam Technology
Introduction
Tadao Suganuma is a notable inventor based in Hachiouji, Japan. He has made significant contributions to the field of charged particle beam technology. His innovative approach has led to advancements that enhance the precision and efficiency of handling charged particle beams.
Latest Patents
Tadao Suganuma holds a patent for a "Method and apparatus for handling charged particle beam." This invention involves a method and apparatus that computes signals representative of astigmatism and corrections for it. The system detects values under specific conditions from signal particles derived from an object that is moved in at least two directions with respect to a charged particle beam. The computed amount and direction of astigmatism are displayed for manual correction, and the system can also perform astigmatism correction and focusing automatically. He has 1 patent to his name.
Career Highlights
Suganuma is associated with Elionix Inc., a company known for its expertise in electron beam lithography and related technologies. His work at Elionix has allowed him to apply his innovative ideas in a practical setting, contributing to the company's advancements in the field.
Conclusion
Tadao Suganuma's contributions to charged particle beam technology exemplify the impact of innovation in scientific fields. His patent reflects a commitment to improving precision in handling charged particle beams, showcasing his role as a significant inventor in this area.