The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 1985
Filed:
Jul. 18, 1983
Applicant:
Inventor:
Tadao Suganuma, Hachiouji, JP;
Assignee:
Elionix, Inc., Hachiouji, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250310 ; 250311 ;
Abstract
In a method of and an apparatus for handling a charged particle beam, at least one of a signal representative of the astigmatism and a signal for correction of the astigmatism is obtained by computation on the basis of values detected under a certain condition from signal particles derived from an object which is moved repeatedly at least two directions with respect to a charged particle beam. The amount and direction of astigmatism thus computed are displayed respectively for manual correction. Astigmatism correction and focusing can be also carried out automatically.