Hsinchu, Taiwan

Szu-Tsun Ma


Average Co-Inventor Count = 2.0

ph-index = 1

Forward Citations = 2(Granted Patents)


Location History:

  • Hsinchu, TW (2004)
  • Hsinchu, CN (2007)

Company Filing History:


Years Active: 2004-2007

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3 patents (USPTO):Explore Patents

Title: Szu-Tsun Ma: Innovator in Integrated Circuit Technology

Introduction

Szu-Tsun Ma is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of integrated circuit technology, holding a total of 3 patents. His work focuses on improving the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of Szu-Tsun Ma's latest patents is a method and system for analyzing defects of an integrated circuit wafer. This innovative approach utilizes an asymmetric visual defect review methodology to effectively extract high yield-killing defects from numerous reported defects. The method involves inspecting the semiconductor wafer to obtain defect location and size, and asymmetrically sampling defects based on determined review ratios. This system enhances the ability to identify critical defects within limited review capacity and manpower.

Another notable patent is a method of boosting wafer cleaning efficiency and increasing process yield. In this process, different types of particles are deposited on a test wafer, which is then cleaned and scanned to assess the efficiency of the cleaning operation. The results guide adjustments to the cleaning parameters, maximizing the overall cleaning efficiency.

Career Highlights

Szu-Tsun Ma is currently employed at Macronix International Co., Ltd., where he continues to innovate in the semiconductor industry. His expertise in integrated circuit technology has positioned him as a valuable asset to his company and the field at large.

Collaborations

Throughout his career, Szu-Tsun Ma has collaborated with notable colleagues, including Kent Kuohua Chang and Shu-Sing Liao. These partnerships have contributed to the advancement of technology in their shared field.

Conclusion

Szu-Tsun Ma's contributions to integrated circuit technology through his patents and work at Macronix International Co., Ltd. highlight his role as an influential inventor. His innovative methods for analyzing defects and improving cleaning efficiency are paving the way for advancements in semiconductor manufacturing.

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