This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Asml Netherlands B.v.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Szu-Po Wang: Patent Work in Charged-Particle Inspection
Introduction
Szu-Po Wang is an inventor based in Kaohsiung, Taiwan. His patent work includes technology for determining local focus points during inspection in a charged-particle system.
Latest Patents
Wang is associated with 1 patent: “System and Method for Determining Local Focus Points During Inspection in a Charged Particle System.” The invention describes apparatuses, systems, and methods for identifying local focus points on a sample. A controller selects resist-pattern designs, runs process simulations, identifies a hotspot, evaluates focus-related characteristics for candidate patterns, and uses those characteristics to determine local focus-point locations.
Career Highlights
Wang is associated with ASML Netherlands B.V. His patent concerns charged-particle inspection and the use of simulated resist patterns to guide focus-point selection.
Collaborations
Wang’s listed coworkers include Te-Sheng Wang and Tsung-Hsien Liu.
Conclusion
Szu-Po Wang’s patent work addresses local focus-point determination for charged-particle inspection, connecting process simulation and resist-pattern analysis to inspection-system focusing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile