Sze-An Wu

Title: Innovations by Sze-An Wu in Semiconductor Technology

Introduction

Sze-An Wu is a notable inventor based in Hsin-Chu, Taiwan, recognized for his contributions to semiconductor technology. He has been instrumental in developing methods that enhance the performance and reliability of semiconductor devices. With a total of 2 patents to his name, his work has significantly impacted the industry.

Latest Patents

Sze-An Wu's latest patents include a method of forming in-situ SRO HDP-CVD barrier film. This innovative method aims to reduce plasma-induced damage in semiconductor devices and fluorine damage to metal-containing layers. The process involves providing a semiconductor wafer with devices that include a gate oxide and metal lines. A first high-density plasma chemical vapor deposition (HDP-CVD) process is carried out to produce a silicon-rich oxide (SRO) layer with a controlled thickness. Following this, a second HDP-CVD process is performed in-situ to deposit a fluorine-doped silicon dioxide layer over the SRO layer, effectively filling the space between the metal lines.

Another significant patent by Wu is a method to neutralize charge imbalance following a wafer cleaning process. This method addresses the electrical charge imbalance that occurs on a wafer's process surface after cleaning. It involves providing a semiconductor wafer with a process surface that includes an uppermost first material layer. The cleaning process, which may include spraying and scrubbing, creates an electrical charge imbalance. To counteract this, the process surface is subjected to a nitrogen-containing plasma treatment, which helps to neutralize the imbalance.

Career Highlights

Sze-An Wu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to focus on innovative solutions that enhance semiconductor manufacturing processes.

Collaborations

Throughout his career, Wu has collaborated with esteemed colleagues, including Yi-Lung Cheng and Ming-Hwa Yoo. These collaborations have fostered a productive environment for innovation and development in semiconductor technologies.

Conclusion

Sze-An Wu's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key innovator in the field. His methods for improving semiconductor device performance are vital for the ongoing advancement of technology.