Company Filing History:
Years Active: 2008-2010
Title: Syouichiro Himuro: Innovator in Electrostatic Chuck Technology
Introduction
Syouichiro Himuro is a notable inventor based in Fukuoka, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding 2 patents in this area. His work focuses on enhancing the performance and efficiency of devices used in semiconductor manufacturing.
Latest Patents
Himuro's latest patents revolve around the development of an electrostatic chuck. This invention provides high plasma resistance and an enhanced capability for cooling materials that need to be clamped. The basic structure of the electrostatic chuck includes an insulating film formed on a metal plate through flame spraying. A dielectric substrate is then bonded onto this insulating film using an insulating adhesive layer. The top surface of the dielectric substrate serves as the mounting area for materials such as semiconductor wafers, while electrodes are formed on the lower surface of the dielectric substrate.
Career Highlights
Syouichiro Himuro is currently employed at Toto Ltd., where he continues to innovate in the field of electrostatic technology. His work has been instrumental in advancing the capabilities of semiconductor manufacturing equipment.
Collaborations
Himuro collaborates with Ikuo Itakura, contributing to the development of cutting-edge technologies in their field.
Conclusion
Syouichiro Himuro's contributions to electrostatic chuck technology highlight his role as an influential inventor in the semiconductor industry. His innovative designs and patents continue to shape the future of manufacturing processes.