Susan S Lopez

Title: Innovations by Susan S. Lopez

Introduction

Susan S. Lopez is a notable inventor based in Santa Clara, CA (US). She has made significant contributions to the field of technology, particularly in the area of defect analysis in specimens. Her work has implications for improving manufacturing processes and enhancing product quality.

Latest Patents

Susan S. Lopez holds a patent titled "Methods for correlating backside and frontside defects detected on a specimen and classification of backside defects." This patent describes computer-implemented methods that correlate backside defects with frontside defects detected on a specimen. The correlation occurs when a portion of the backside defect aligns with a portion of the frontside defect along an axis perpendicular to both sides of the specimen. Additionally, the method may involve altering a parameter of a process tool in response to the backside defect to reduce frontside defects on additional specimens processed in the tool. The patent also includes methods for analyzing data representing spatial characteristics of backside defects to classify them, utilizing spatial signature analysis.

Career Highlights

Susan S. Lopez is associated with Kla-Tencor Technologies Corporation, where she applies her expertise in defect analysis. Her innovative approaches have contributed to advancements in the field, showcasing her commitment to improving technology and processes.

Collaborations

One of her notable collaborators is Kurt Lindsay Haller, with whom she has worked on various projects related to defect analysis and classification.

Conclusion

Susan S. Lopez's contributions to the field of technology through her innovative patent and work at Kla-Tencor Technologies Corporation highlight her role as a significant inventor. Her methods for analyzing and correlating defects are essential for enhancing manufacturing processes and ensuring product quality.