Susan K Fung

Title: The Innovations of Susan K Fung

Introduction

Susan K Fung is a notable inventor based in Worcester, MA. She has made significant contributions to the field of microlithography, particularly in the development of methods that enhance the production of high-density magnetic thin film heads. Her work is characterized by a focus on creating thick, vertically-walled resist patterns that are essential for various advanced applications.

Latest Patents

Susan K Fung holds a patent for a microlithographic method for producing thick, vertically-walled resist patterns. This innovative process allows for the generation of very thick resist patterns, which are crucial for subsequent deposition or etching operations. The technology enables the production of devices that require high aspect ratios, thereby improving the performance and efficiency of magnetic thin film heads.

Career Highlights

Throughout her career, Susan has been associated with Digital Equipment Corporation, where she has applied her expertise in microlithography. Her work has not only advanced the technology in her field but has also contributed to the overall growth of the industry. With a patent portfolio that includes 1 patent, she has established herself as a key figure in her area of specialization.

Collaborations

Susan has collaborated with various professionals in her field, including her coworker Alan L Sidman. These collaborations have fostered innovation and have led to the development of cutting-edge technologies in microlithography.

Conclusion

Susan K Fung's contributions to the field of microlithography exemplify the impact of innovative thinking in technology. Her patented methods continue to influence the production of advanced devices, showcasing her role as a significant inventor in the industry.