Location History:
- Cupertino, CA (US) (1994 - 1996)
- Untergruppenbach, DE (1996 - 1999)
- Untergruttenbach, DE (1998 - 2001)
- Mountain View, CA (US) (2001)
Company Filing History:
Years Active: 1994-2001
Title: Innovations of Susan G. Telford in Integrated Circuit Technology
Introduction
Susan G. Telford is a prominent inventor based in Mountain View, California, known for her significant contributions to the field of integrated circuit technology. With a remarkable portfolio of 11 patents, she has made notable advancements that enhance the performance and reliability of semiconductor components.
Latest Patents
Among her latest innovations is the patent for "Anodized Aluminum Susceptor for Forming Integrated Circuit Structures and Method of Making Anodized Aluminum Susceptor." This invention discloses a method of creating an anodized aluminum susceptor that can withstand elevated temperatures of up to 590°C, or 475°C in the presence of an NF plasma, without peeling or cracking. The process involves selecting a high purity or low magnesium aluminum alloy, roughening the surface, and anodizing it in an electrolyte made with organic acid to achieve a durable aluminum oxide coating. This innovation is critical for maintaining the integrity of semiconductor manufacturing processes under extreme conditions.
Additionally, her invention regarding the utilization of SiH4 soak and purge during deposition processes stands as a testament to her expertise in enhancing the semiconductor fabrication process.
Career Highlights
Susan G. Telford has made her mark in the technology sector while working with Applied Materials, Inc., a leader in materials engineering solutions for the semiconductor industry. Her innovative approaches have played a crucial role in advancing the company's technological capabilities and enhancing product performance.
Collaborations
Throughout her career, Susan has collaborated with esteemed colleagues such as Meng Chu Tseng and Michio Aruga. These collaborations have further enriched her research and development ventures, facilitating the exchange of ideas and expertise in the field.
Conclusion
In summary, Susan G. Telford's contributions to the world of integrated circuit technology reflect her dedication and innovative spirit. Her patents serve as a foundation for ongoing advancements in the semiconductor industry, showcasing her position as a leading inventor in this critical technological domain.