Company Filing History:
Years Active: 1993-1994
Title: Suresh Venkatesan: Innovator in Semiconductor Technology
Introduction
Suresh Venkatesan is a notable inventor based in West Lafayette, IN (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to integrated circuits.
Latest Patents
His latest patents include a method for forming a dual-gated semiconductor-on-insulator field effect transistor. This method involves the formation of a gate/oxide/channel/oxide/gate stack on top of an insulating layer. The process begins with the creation of a first gate electrode and first oxide layer on an insulating layer. Following this, a seed hole in the insulating layer is formed, exposing the underlying substrate. The epitaxial lateral overgrowth (ELO) of monocrystalline silicon is then performed from the seed hole to the top of the first oxide layer, forming the device channel. A second oxide and second gate electrode layer are subsequently grown and deposited. The process includes etch steps employing sidewall spacers to create a multilayered stack with self-aligned first and second gate electrodes. Sidewall seed holes are utilized to epitaxially grow monocrystalline source and drain regions from the channel. In-situ doping is provided to form a lightly doped source (LDS) and drain (LDD) structure with vertically displaced source and drain contacts.
Career Highlights
Suresh Venkatesan is affiliated with the Purdue Research Foundation, where he continues to advance his research in semiconductor technologies. His work has been instrumental in developing innovative solutions that enhance the performance of integrated circuits.
Collaborations
He collaborates with Gerold W Neudeck, a fellow researcher, to further explore advancements in semiconductor technology.
Conclusion
Suresh Venkatesan's contributions to the field of semiconductor technology through his patents and research at Purdue Research Foundation highlight his role as an influential inventor. His innovative methods continue to shape the future of integrated circuits.