Sungjoo An

Title: Sungjoo An: Semiconductor Processing Innovation

Introduction

Sungjoo An is an inventor based in Yongin-si, South Korea, and is associated with Samsung Electronics Ltd. His patent work concerns equipment and methods for processing substrates used in semiconductor manufacturing.

Latest Patents

An is credited with 1 patent. His patent, “Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same,” describes an apparatus that supports multiple substrates within a chamber. An upper plate has separate plate portions that, together with the substrate support, define multiple process regions and separations between them. The design provides a pretreatment region with a first height and a deposition region with a greater second height. The patent also describes using the apparatus in a method of manufacturing a semiconductor device.

Career Highlights

An’s listed patent reflects work on semiconductor processing equipment, particularly the arrangement of distinct regions for pretreatment and deposition. His association with Samsung Electronics Ltd. places this work within the company’s semiconductor technology activities.

Collaborations

Geuno Jeong and Janghee Lee are identified as An’s coworkers. The available information does not specify their roles in the patent or whether they collaborated directly on the invention.

Conclusion

Sungjoo An’s patent focuses on a substrate processing apparatus that separates pretreatment and deposition regions, contributing to the development of semiconductor manufacturing technology.