Location History:
- Inchon, KR (1999)
- Kyungki-do, KR (2000)
Company Filing History:
Years Active: 1999-2000
Title: Innovations of Sung-kyeong Kim in Semiconductor Technology
Introduction
Sung-kyeong Kim is a notable inventor based in Kyungki-do, South Korea. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his expertise and innovative spirit.
Latest Patents
One of his latest patents is a method of etching metallic film for semiconductor devices. This method involves inserting a semiconductor substrate with a metallic film exposed in a film pattern onto a chuck in a chamber of an electrostatic shielded radio frequency (ESRF) inductive-coupled plasma source. The process includes supplying an etching gas at a predetermined rate while maintaining specific pressure levels and temperatures. The result is the formation of trenches in the metallic film with predetermined qualities, crucial for large-scale integration.
Another significant patent focuses on methods for performing plasma etching operations on microelectronic structures. This method includes masking the layer to be etched and providing an etching gas along with an additional gas that generates a compound with a carbene structure when exposed to plasma discharge. The generated plasma etches the exposed portions of the layer, improving the profile of the etched layer through the formation of a polymer on the sidewalls.
Career Highlights
Sung-kyeong Kim is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in advancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
He has collaborated with notable coworkers such as Whi-kun Yi and Dai-sik Moon, contributing to a dynamic and innovative work environment.
Conclusion
Sung-kyeong Kim's contributions to semiconductor technology through his patents reflect his dedication to innovation and excellence in the field. His work at Samsung Electronics Co., Ltd. continues to influence the industry positively.