Sundarapandian Ramalinga Vijayalakshmi Reddy

Title: Innovations by Sundarapandian Ramalinga Vijayalakshmi Reddy

Introduction

Sundarapandian Ramalinga Vijayalakshmi Reddy is a notable inventor based in Bengaluru, India. He has made significant contributions to the field of physical vapor deposition (PVD) technology. With a total of 5 patents to his name, his work focuses on improving processes and reducing defects in substrate processing.

Latest Patents

One of his latest patents is the "Shutter disk for physical vapor deposition (PVD) chamber." This invention includes methods and apparatus designed to reduce defects in substrates processed within a PVD chamber. The patent outlines a method for cleaning a process kit located in the inner volume of a process chamber. This involves positioning a non-sputtering shutter disk on a substrate support, energizing an oxygen-containing cleaning gas to create a plasma reactive with carbon-based materials, and heating the process kit to remove carbon-based materials adhered to it.

Career Highlights

Sundarapandian is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display technology sectors. His work at this organization has allowed him to develop innovative solutions that enhance the efficiency and effectiveness of PVD processes.

Collaborations

He has collaborated with several professionals in his field, including Kirankumar Neelasandra Savandaiah and Shane Lavan. These collaborations have contributed to the advancement of technology in the PVD domain.

Conclusion

Sundarapandian Ramalinga Vijayalakshmi Reddy's contributions to the field of physical vapor deposition are noteworthy. His innovative patents and collaborations reflect his commitment to advancing technology in this area.