This inventor holds 2 USPTO granted patents. Top assignee: Shin-Etsu Handotai Co., Ltd.. Active years: 1995-1996.
Location History:
- Fukushima, JP (1995)
- Nishigo, JP (1996)
Company Filing History:
Years Active: 1995-1996
Title: Innovations by Sunao Shima in Semiconductor Technology
Introduction
Sunao Shima is a notable inventor based in Fukushima, Japan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that enhance the manufacturing processes of semiconductor wafers. His work focuses on improving the quality and yield of electronic devices.
Latest Patents
Shima's latest patents include a method of making semiconductor wafers and a method for the production of wafers. The first patent describes a technique for creating a flatter semiconductor wafer that minimizes irregularities and particles generated during handling. This method employs alkaline etching combined with a slight polishing step to achieve a smoother surface, thereby reducing particle generation and increasing the yield of electronic device fabrication. The second patent outlines a comprehensive method for wafer production that ensures high yield during photolithography. This method includes several steps, such as slicing, chamfering, lapping, etching, and polishing, with a unique reverse surface-preparing step to enhance the wafer's quality.
Career Highlights
Sunao Shima is currently associated with Shin-Etsu Handotai Co., Ltd., a leading company in the semiconductor industry. His innovative approaches have contributed to advancements in wafer manufacturing, making him a valuable asset to his organization.
Collaborations
Shima has collaborated with notable colleagues, including Hisashi Masumura and Tadahiro Kato. Their combined expertise has furthered the development of innovative solutions in semiconductor technology.
Conclusion
Sunao Shima's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the efficiency and quality of electronic device manufacturing.
