Sunao Egashira

Title: Innovations by Sunao Egashira

Introduction

Sunao Egashira is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of radio frequency technology, holding three patents that showcase his innovative spirit and technical expertise.

Latest Patents

One of his latest patents is the Wilkinson-type combiner and RF generator. This invention is a low-cost, small-size Wilkinson-type combiner designed to suppress the risk of damaging an isolation resistor due to combination loss. The combiner features first and second input terminals for RF signals, an output terminal, and a wiring line that combines the RF signals. It also includes an isolation unit formed by a series of components, including isolation resistors and a transformer. Additionally, a detection circuit is integrated to monitor the current in the isolation unit, ensuring safe operation by blocking RF signal input when necessary.

Another notable patent is the RF generator device and substrate processing apparatus. This device supplies RF powers of different frequencies to multiple antennas within a chamber. It consists of several RF generators and controllers, with each controller incorporating a fast Fourier transformer and a filter. The fast Fourier transformer decomposes reflected wave signals into frequency components, while the filter eliminates unwanted frequency components, ensuring efficient operation.

Career Highlights

Sunao Egashira is currently employed at Hitachi Kokusai Electric Inc., where he continues to develop cutting-edge technologies in the field of RF systems. His work