This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Sun Hee Choy: Semiconductor Manufacturing Inventor
Introduction
Sun Hee Choy is an inventor based in Jeonju, South Korea. His patent work concerns semiconductor manufacturing equipment and processes, and he is associated with Samsung Electronics Ltd.
Latest Patents
Choy is credited with 1 patent: “Substrate Treatment Apparatus and Semiconductor Device Manufacturing Method Using the Same.” The invention describes loading a substrate into a treatment apparatus, depositing material on it, and cleaning the apparatus. Its system includes a housing with a treatment area, a gas supply, a remote plasma supply, and a shower head. The gas supply delivers a first process gas at a flow rate of 1,000 to 15,000 sccm, as well as a second process gas. The remote plasma supply applies RF power to generate plasmas from both gases, which the shower head delivers to the treatment area. The second process plasma is used to clean membrane material deposited on the housing’s inner wall.
Career Highlights
Choy’s listed patent focuses on integrating deposition and equipment-cleaning steps into a semiconductor device manufacturing method. The apparatus design uses remote plasma and a shower head to deliver process plasmas to the treatment area.
Collaborations
The provided information identifies Woo Hyun Lee and Su Ji Gim as Choy’s coworkers. It does not specify their roles in the patent or the nature of their collaboration.
Conclusion
Sun Hee Choy’s patent describes a semiconductor treatment apparatus and manufacturing method that combine substrate deposition with plasma-based cleaning of the equipment.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile