This inventor holds 2 USPTO granted patents and 2 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2022.
Company Filing History:
Years Active: 2022
Title: Suguru Motegi: Innovator in Substrate Processing Systems
Introduction
Suguru Motegi is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing systems, holding a total of 2 patents. His work is instrumental in advancing technologies that enhance substrate processing efficiency.
Latest Patents
Motegi's latest patents include innovative designs for substrate processing systems. The first patent describes a substrate processing system that features a first chamber, a second chamber, and a cooling passage. The first chamber is designed to process a substrate transferred from a first transfer chamber maintained in a vacuum atmosphere. The second chamber, aligned vertically with the first, communicates with both the first transfer chamber and a second transfer chamber maintained in an atmospheric atmosphere. Notably, the second chamber has a footprint that matches that of the first chamber, and a cooling passage is integrated between the two chambers to facilitate coolant flow.
The second patent outlines a substrate processing system installed on a floor face. This system includes a substrate transfer module and a supporting table with a top plate that is separate from the floor face. A variety of substrate processing modules are positioned on the top plate and connected to the substrate transfer module. Additionally, multiple power units are located beneath the top plate, each corresponding to a specific substrate processing module to supply the necessary electric power.
Career Highlights
Suguru Motegi is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been pivotal in developing advanced substrate processing technologies.
Collaborations
Motegi collaborates with notable colleagues, including Akira Kodashima and Takashi Kumagai. Their combined expertise contributes to the innovative advancements in substrate processing systems.
Conclusion
Suguru Motegi's contributions to substrate processing systems reflect his dedication to innovation and technology. His patents and work at Tokyo Electron Limited continue to influence the industry positively.