This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignees: Dongbu Electronics, Co. Ltd., Hyundai Electronics Industries Co. Ltd., Pelemed Co., Ltd.. Active years: 2001-2026.
Company Filing History:
1 out of 836 
1 out of 2,340 
1 out of 1 Years Active: 2001-2026
Title: Su Jin Oh: Innovator in Semiconductor Technology
Introduction
Su Jin Oh is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, holding 3 patents that showcase his innovative approaches to improving semiconductor devices.
Latest Patents
One of his latest patents is a method for forming metal wirings of semiconductor devices. This method involves depositing a first etch stop layer, a dielectric layer, a second etch stop layer, and a wiring layer on a semiconductor substrate. A hole is formed by etching through these layers, followed by the formation of a trench. The exposed etch stop layers are then removed, and a barrier metal layer is deposited on the inner walls of the hole and trench. This process is crucial for enhancing the efficiency and performance of semiconductor devices.
Another notable patent by Su Jin Oh is a method for forming contacts of semiconductor devices. This invention utilizes an oxidized silicon-rich nitride film as an etch barrier film for a self-aligned contact process. The oxidized silicon-rich nitride film exhibits less stress compared to traditional nitride films, preventing degradation of device characteristics and avoiding cracks during thermal processes. This innovation simplifies the overall process and improves the operating speed of devices by reducing parasitic capacitance.
Career Highlights
Su Jin Oh has worked with leading companies in the semiconductor industry, including Hyundai Electronics Industries Co. Ltd. and Dongbu Electronics Co. Ltd. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor manufacturing.
Collaborations
Throughout his career, Su Jin Oh has collaborated with notable colleagues, including Jeong Ho Kim and Jae Ok Ryu. These collaborations have contributed to the advancement of semiconductor technologies and the successful implementation of his patented methods.
Conclusion
Su Jin Oh is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the field. His innovative patents and collaborations with industry leaders highlight his commitment to improving semiconductor device performance.