Company Filing History:
Years Active: 2022-2025
Title: Innovations of Su Hyung Lee
Introduction
Su Hyung Lee is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of substrate treatment and electrostatic chuck inspection. With a total of 4 patents, his work showcases innovative solutions that enhance the quality and efficiency of various processes.
Latest Patents
One of his latest patents is an "Apparatus for treating substrate." This inventive concept provides a substrate treating apparatus that includes a housing with a treating space for treating a substrate. The apparatus features a support unit positioned within the treating space and a plasma source that generates plasma by exciting gas supplied to the treating space. The support unit consists of a first plate where the substrate is positioned on the top side, a second plate located at the bottom side of the first plate, and an adhesive layer that adheres the two plates together. Notably, the top surface of the second plate is divided into a central region and an edge region, with a significant difference in the height of the adhesive layer between these regions.
Another significant patent is the "Apparatus and method for inspecting electrostatic chuck." This invention provides a non-destructive method for inspecting the quality of an electrostatic chuck. The apparatus includes a measurement unit that measures the first capacitance of a dielectric layer and the second capacitance of an electrode installed in the dielectric layer. A control unit evaluates the quality of the electrode based on these capacitance measurements.
Career Highlights
Su Hyung Lee is currently employed at Semes Co., Ltd., where he continues to innovate and develop new technologies. His work has been instrumental in advancing the capabilities of substrate treatment and inspection technologies.
Collaborations
Throughout his career, Su Hyung Lee has collaborated with talented individuals such as Ju Yong Jang and Ga Yeon Kim. Their teamwork has contributed to the successful development of innovative solutions in their field.
Conclusion
Su Hyung Lee's contributions to the field of technology through his patents and collaborations highlight his role as a significant inventor. His innovative approaches to substrate treatment and electrostatic chuck inspection continue to influence the industry positively.