Stuart D Cheney

Title: Innovations of Stuart D Cheney

Introduction

Stuart D Cheney is a notable inventor based in Essex Junction, Vermont, who has made significant contributions to the field of technology. He holds three patents that showcase his innovative spirit and technical expertise. His work primarily focuses on advancements in chemical mechanical polishing tools and BiCMOS technology.

Latest Patents

One of Cheney's latest patents is for a removable/disposable platen top. This invention comprises a chemical mechanical polishing tool that features a polishing platen and a removable, replaceable platen top. The platen top is designed to be substantially impervious to the slurries used in planarizing objects. It can be tailored to enhance polishing conditions by acting as an insulator or conductor, and it may be machined to be concave or convex. Additionally, the invention includes endpoint sensors attached to the platen top.

Another significant patent by Cheney is the selectively removable filler layer for BiCMOS processes. This invention is intended for use in BiCMOS technology, where bipolar junction transistors (BJTs) are formed after field-effect transistors (FETs). The process involves depositing a thin FET protection layer on the semiconductor substrate, followed by a selectively removable filler layer. This layer is planarized to expose the FET protection layer on top of the gates, allowing for the construction of BJTs without residual films in the recessed regions.

Career Highlights

Stuart D Cheney has had a distinguished career at the International Business Machines Corporation (IBM), where he has contributed to various innovative projects. His work has been instrumental in advancing technologies that are critical to modern electronics and semiconductor manufacturing.

Collaborations

Cheney has collaborated with notable coworkers, including Kent R Becker and Scott R Cline, who have also contributed to the field of technology and innovation.

Conclusion

Stuart D Cheney's contributions to the field of technology through his patents and work at IBM highlight his role as a significant inventor. His innovative solutions in chemical mechanical polishing and BiCMOS technology continue to impact the industry positively.