Steven L Peterman

Title: Innovations by Steven L. Peterman: A Pioneer in Semiconductor Processes

Introduction

Steven L. Peterman, an inventive mind located in Manassas, VA, has made significant contributions to the semiconductor industry. With a total of two patents to his name, his work showcases innovative processes that enhance the functionality and efficiency of electronic devices.

Latest Patents

Among his latest patents, Steven has developed a pioneering *Process for Defining Vias through Silicon Nitride and Polyamide*. This patented process involves a sophisticated method of defining vias through layers of silicon nitride and polyimide. It details how, after depositing a first layer of silicon nitride and a subsequent layer of polyimide, a layer of photoresist can be lithographically defined to create negatively sloped walls. The implementation of a CF4/O2 gas mixture for etching the polyimide layer and a CF4/H2 gas mixture for the silicon nitride layer utilizing the developed photoresist layer as an etch mask underscores a groundbreaking advancement in semiconductor manufacturing.

In addition, Steven holds a patent for a *Process for Making Self-Aligned Contacts*. This innovation relates to fabricating metal contacts and interconnection lines that are self-aligned. The process involves forming trenches in a polyimide layer that will subsequently receive metal interconnections, ensuring the alignment of contact windows through an insulating layer. By utilizing patterned photoresist and polyimide layers as etch masks, the resulting technology enhances precision in semiconductor device fabrication.

Career Highlights

Steven L. Peterman is currently associated with the International Business Machines Corporation (IBM), where he continues to contribute to cutting-edge semiconductor technologies. His experience and expertise in the field have positioned him as a key figure in the development of advanced electronic systems.

Collaborations

Throughout his career, Steven has collaborated with notable professionals including David Stanasolovich and Madan M. Nanda. These collaborations have likely enriched his inventive process and contributed to the successful development of his patented technologies.

Conclusion

Steven L. Peterman's contributions to the semiconductor industry through his innovative patents reflect a dedication to advancing technology in electronic devices. His work at IBM and collaborations with skilled colleagues underline the importance of teamwork and creativity in driving forward the boundaries of what is possible in semiconductor processes.