Steven Hilton Johnston

Title: The Innovations of Steven Hilton Johnston

Introduction

Steven Hilton Johnston is a notable inventor based in Poughkeepsie, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work primarily focuses on methods and structures that enhance the performance and reliability of semiconductor devices.

Latest Patents

One of Johnston's latest patents is titled "Chemical oxide removal of plasma damaged SiCOH low k dielectrics." This invention presents a structure and method for effectively removing damages from a dual damascene structure after plasma etching. The method utilizes sublimation processes to deposit reactive material onto the damaged regions, allowing for controlled removal of the affected areas. Additionally, the semiconductor structure includes a dual damascene design that has been treated using this innovative method.

Another significant patent is the "Method and apparatus for treating wafer edge region with toroidal plasma." This invention describes a method and apparatus designed to treat the edge region of a wafer. It features a toroidal-shaped plasma cavity with an inner diameter slightly less than that of the wafer being treated. This design ensures that only the edge region of the wafer extends into the plasma cavity. An inert gas is flowed across both the front and back sides of the wafer into the plasma cavity, while a reactive gas is introduced directly into the cavity. The gases exit the cavity without coming into contact with the wafer's surface.

Career Highlights

Steven Johnston is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the semiconductor field. His work has been instrumental in advancing technologies that improve the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Throughout his career, Johnston has collaborated with several talented individuals, including William G America and Brian W Messenger. These collaborations have contributed to the development of groundbreaking technologies in the semiconductor industry.

Conclusion

Steven Hilton Johnston's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence advancements in semiconductor manufacturing and technology.