Steven E Monahan

Title: Steven E. Monahan: Innovator in Semiconductor Technology

Introduction

Steven E. Monahan is a notable inventor based in Rochester, MN (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving processes related to semiconductor wafer polishing and vapor removal.

Latest Patents

One of his latest patents is a slurry containment device for polishing semiconductor wafers. This innovative device utilizes liquid abrasive slurry for chemical-mechanical polishing, which is held on a rotating polish table by a containment device featuring two continuous circular bonded strips of differing flexibilities. A releasable clamp seals the entire length of the more flexible strip to the table periphery, enhancing the efficiency of the polishing process. Another significant patent is a method and apparatus for removing vapor from a pressurized spray. In this invention, pressurized liquid solvent is dispensed on specific areas of a semiconductor wafer, while a vented accumulator effectively removes bubbles introduced by an upstream needle valve. The accumulator outlet leads directly to a dispensing tip, ensuring minimal pressure drop.

Career Highlights

Steven E. Monahan is associated with International Business Machines Corporation, commonly known as IBM. His work at IBM has allowed him to be at the forefront of semiconductor innovation, contributing to advancements that benefit the industry.

Collaborations

Throughout his career, Steven has collaborated with notable colleagues, including Willard F. Chandler and Robert D. Johnson. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.

Conclusion

Steven E. Monahan's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor manufacturing processes.