The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 1994
Filed:
May. 06, 1992
Applicant:
Inventors:
Willard F Chandler, Byron, MN (US);
Robert D Johnson, Rochester, MN (US);
Steven E Monahan, Rochester, MN (US);
Ronald W Olson, Dodge Center, MN (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430311 ; 430331 ; 430327 ; 134 33 ; 1341042 ; 1341041 ; 134902 ; 427273 ; 427240 ;
Abstract
Pressurized liquid solvent is dispensed on specific areas of a semiconductor wafer. A vented accumulator removes bubbles introduced by an upstream needle valve. The accumulator outlet leads directly to a dispensing tip, without further pressure drop.
Chandler, Willard. (1994). Method and apparatus for removing vapor from a pressurized sprayed (U.S. Patent No. 5279926). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5279926
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile