Company Filing History:
Years Active: 2004-2006
Title: Steve Grove - Innovator in Laser Technology
Introduction
Steve Grove is a notable inventor based in Poway, California. He has made significant contributions to the field of laser technology, particularly in the development of advanced laser systems. With a total of 2 patents, Grove's work has had a substantial impact on production line machinery.
Latest Patents
One of Grove's latest patents is a modular high repetition rate ultraviolet gas discharge laser light source designed for production line machines. This innovative system features an enclosed and purged beam path that delivers the laser beam to specific locations, such as the entrance port of a lithography machine. The design includes two separate discharge chambers, with one serving as a master oscillator that produces a narrow band seed beam, which is then amplified in the second chamber. This MOPA system is capable of output pulse energies that are approximately double those of comparable single chamber laser systems, while also improving beam quality. Additionally, a pulse stretcher is incorporated to more than double the output pulse length, resulting in reduced pulse power compared to prior art laser systems. This embodiment ensures consistent illumination at the lithography system wafer plane throughout the operating life of the system, despite the degradation of optical components.
Career Highlights
Steve Grove is currently employed at Cymer, Inc., where he continues to innovate in the field of laser technology. His work has been instrumental in advancing the capabilities of lithography machines, which are essential in the manufacturing of semiconductors.
Collaborations
Grove has collaborated with notable colleagues, including Brian C Klene and Palash P Das. These partnerships have contributed to the successful development of his patented technologies.
Conclusion
Steve Grove's contributions to laser technology, particularly through his patents, highlight his role as an influential inventor in the field. His work at Cymer, Inc. continues to push the boundaries of what is possible in production line machinery.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.