Mansfield, MA, United States of America

Stephen MacLeod


Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 5(Granted Patents)


Company Filing History:


Years Active: 2009

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1 patent (USPTO):Explore Patents

Title: **The Innovator Behind Wafer Edge-Defect Detection: Stephen MacLeod**

Introduction

Stephen MacLeod is an esteemed inventor hailing from Mansfield, Massachusetts, United States. He has made significant contributions to the field of semiconductor manufacturing through his innovative patent. His dedication to improving wafer processing technology has positioned him as a key figure in his industry.

Latest Patents

Among his inventions, Stephen holds a patent for a "Wafer edge-defect detection and capacitive probe therefor." This advanced detection system utilizes a probe assembly equipped with one or more capacitive plates that conform to the edge shape of a wafer. The system includes processing electronics designed to electronically drive these capacitive plates while sensing an electrical signal that represents the capacitance between the plates and the wafer. Filtering and demodulation techniques are employed to enhance the signal-to-noise ratio, thus improving the accuracy of defect detection.

Career Highlights

Stephen MacLeod is currently associated with KLA Corporation, a leader in process control and yield management solutions in the semiconductor industry. His work at KLA has been instrumental in the development and advancement of technologies that address complex challenges in wafer fabrication and inspection.

Collaborations

Throughout his career, Stephen has collaborated with notable colleagues such as Roy E. Mallory and Jaydeep K. Sinha. Their combined expertise has fostered an environment of innovation, allowing them to tackle various aspects of semiconductor processing and defect detection systems.

Conclusion

Stephen MacLeod's contributions to the field of wafer defect detection exemplify the spirit of innovation that drives the semiconductor industry forward. His patented technologies play a crucial role in enhancing the quality and reliability of semiconductor products, ensuring that advances in electronics continue to progress. Through his work and collaborations, MacLeod remains a vital part of the innovation landscape in semiconductor technology.

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