This inventor holds 2 USPTO granted patents. Top assignee: Texas Instruments Corporation. Active years: 2005-2010.
Company Filing History:
Years Active: 2005-2010
Title: Innovations of Stephen J DeMoor
Introduction
Stephen J DeMoor is an accomplished inventor based in Allen, TX (US). He has made significant contributions to the field of photolithography, particularly in the manufacturing processes of devices. With a total of 2 patents, his work has been instrumental in advancing technology in this area.
Latest Patents
One of Stephen's latest patents is titled "Method of mapping lithography focus errors." This patent focuses on a method for determining photolithography focus errors during the production of a device. The process involves providing a substrate and forming a photoresist pattern on it, which includes a device pattern and one or more blocking scheme patterns. The method further includes performing a device manufacturing process using the photoresist pattern as a mask to create sensor windows on the substrate. Focus error sensors are then formed in these windows, allowing for the determination of focus errors.
Another notable patent is "Characterizing an exposure tool for patterning a wafer." This patent describes the process of receiving data that describes a pattern formed at a wafer. The pattern is created by illuminating the wafer using an exposure tool. The data is then analyzed to determine an image field error, which is separated from the data to reduce variation in the scan direction. This process helps in characterizing the exposure tool by identifying errors associated with it.
Career Highlights
Stephen J DeMoor is currently employed at Texas Instruments Corporation, where he continues to innovate and contribute to advancements in technology. His expertise in photolithography and device manufacturing has made him a valuable asset to the company.
Collaborations
Stephen has collaborated with notable coworkers, including Guohong Zhang and Changan Wang. Their combined efforts have led to significant advancements in their respective fields.
Conclusion
Stephen J DeMoor's contributions to the field of photolithography through his patents and work at Texas Instruments Corporation highlight his role as an influential inventor. His innovative methods and collaborative spirit continue to drive progress in technology.