Company Filing History:
Years Active: 2009-2012
Title: Innovations by Stephen J Cain
Introduction
Stephen J Cain is an accomplished inventor based in Travis, TX (US). He has made significant contributions to the field of substrate processing, holding a total of 3 patents. His work focuses on enhancing the precision and efficiency of substrate alignment and inspection techniques.
Latest Patents
One of his latest patents is titled "Offset correction techniques for positioning substrates within a processing chamber." This method involves aligning a substrate to a process center of a support mechanism by determining substrate thickness after processing at various orientations and radial distances. The process includes deriving process rate values and creating an off-centered plot to facilitate accurate alignment using robotic arms.
Another notable patent is "Offset correction methods and arrangement for positioning and inspecting substrates." This invention features a bevel inspection module equipped with a rotational motor and a camera that captures images of the substrate from multiple angles. The module is designed to enhance the inspection process by providing clear contrast between the substrate and its background.
Career Highlights
Stephen J Cain is currently employed at Lam Research Corporation, where he continues to innovate in substrate processing technologies. His work has been instrumental in advancing the capabilities of substrate alignment and inspection.
Collaborations
Throughout his career, Stephen has collaborated with notable colleagues, including Jack Chen and Andrew D Bailey, III. These partnerships have contributed to the development of cutting-edge technologies in the field.
Conclusion
Stephen J Cain's contributions to substrate processing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to impact the industry positively, showcasing the importance of innovation in engineering.