This inventor holds 1 USPTO granted patent. Top assignee: Kla Tencor Corporation. Active years: 2013.
Company Filing History:
Years Active: 2013
Title: The Innovative Contributions of Stephane P Durant
Introduction
Stephane P Durant is a notable inventor based in Mountain View, CA (US). He has made significant contributions to the field of optical imaging systems, particularly in wafer inspection technology. His innovative work has led to the development of a unique patent that enhances the capabilities of inspection systems.
Latest Patents
Stephane P Durant holds a patent for an "Optical imaging system with laser droplet plasma illuminator." This wafer inspection system utilizes a laser droplet plasma (LDP) light source that generates light with sufficient radiance to enable bright field inspection at wavelengths down to 40 nanometers. The LDP source includes a droplet generator that dispenses droplets of a feed material. An excitation light generated by a laser is focused on a droplet of the feed material. The interaction of the excitation light with the droplet generates a plasma that emits illumination light with a radiance of at least 10 W/mm-sr within a spectral range from 40 nanometers to 200 nanometers. This innovative technology is crucial for advancing the precision of wafer inspections.
Career Highlights
Stephane P Durant is currently employed at Kla Tencor Corporation, where he continues to push the boundaries of optical imaging technology. His work at the company has been instrumental in developing advanced inspection systems that are vital for the semiconductor industry. With 1 patent to his name, Durant's contributions are recognized within the field.
Collaborations
Throughout his career, Stephane has collaborated with esteemed colleagues such as Richard William Solarz and Shiow-Hwei Hwang. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in optical imaging.
Conclusion
Stephane P Durant's work in optical imaging systems exemplifies the spirit of innovation in the technology sector. His patent for an optical imaging system with a laser droplet plasma illuminator showcases his commitment to advancing wafer inspection technology. His contributions continue to impact the industry positively.