Stefan Troeger

Title: The Innovations of Stefan Troeger

Introduction

Stefan Troeger is a notable inventor based in Ulm, Germany. He has made significant contributions to the field of microlithography, particularly through his innovative patents. With a total of 3 patents to his name, Troeger continues to push the boundaries of technology in his industry.

Latest Patents

Troeger's latest patents include an assembly designed for use in microlithographic projection exposure apparatuses. This assembly features an optical element and a joint arrangement that mechanically supports the optical element. The joint arrangement includes at least one connecting element that is secured to the optical element. Notably, the mass of this connecting element is distributed along its length, which increases its moment of inertia compared to a uniformly distributed connecting element of the same mass and length.

Another significant patent addresses the compensation of creep effects in an imaging device. This arrangement involves first and second supporting structures, where the first supports an optical element of the imaging device. The second supporting structure is equipped with a measuring device that assesses the position and orientation of the optical element in relation to a reference point. This innovative design allows for adjustments in at least one correction degree of freedom, enhancing the overall performance of the imaging device.

Career Highlights

Stefan Troeger is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and technologies. His work at this esteemed organization has allowed him to develop and refine his inventions, contributing to advancements in microlithography.

Collaborations

Throughout his career, Troeger has collaborated with talented individuals such as Thomas Gorius and Marwène Nefzi. These partnerships have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Stefan Troeger is a prominent figure in the field of microlithography, with a focus on enhancing optical systems through his inventive patents. His contributions continue to shape the future of technology in this specialized area.