Stefan Rist

Title: The Innovative Contributions of Stefan Rist

Introduction

Stefan Rist is a notable inventor based in Aalen, Germany. He has made significant contributions to the field of microlithography, particularly through his innovative patents. With a total of three patents to his name, Rist has demonstrated a commitment to advancing technology in his area of expertise.

Latest Patents

One of Rist's latest patents is a projection exposure apparatus that includes at least one manipulator. This microlithography projection exposure apparatus features a projection lens and a manipulator designed to change the optical effect of at least one optical element of the projection lens. Additionally, it incorporates a travel establishing device that generates a travel command for the manipulator. Another significant patent involves a projection exposure apparatus that includes at least one mirror. This apparatus consists of a projection lens for imaging mask structures via exposure radiation, along with a read-in device for application-specific structure information. The travel establishing device in this patent is configured to establish a travel command through an at least two-stage optimization process.

Career Highlights

Stefan Rist is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and microlithography. His work at this esteemed organization has allowed him to contribute to cutting-edge technologies that are essential for modern manufacturing processes.

Collaborations

Rist has collaborated with several talented individuals in his field, including Boris Bittner and Norbert Wabra. These collaborations have further enhanced his innovative capabilities and have contributed to the success of his projects.

Conclusion

Stefan Rist's contributions to microlithography through his patents and work at Carl Zeiss SMT GmbH highlight his importance as an inventor. His innovative spirit continues to drive advancements in technology, making a lasting impact on the industry.