Stefan Detterbeck

Title: The Innovations of Stefan Detterbeck

Introduction

Stefan Detterbeck is a notable inventor based in Villach, Austria. He has made significant contributions to the field of technology, particularly in the area of liquid dispensing and etching processes. With a total of 2 patents, his work has garnered attention for its innovative approaches and practical applications.

Latest Patents

Detterbeck's latest patents include a slit nozzle designed for dispensing liquid onto the surface of a wafer. This slit nozzle features a nozzle body with a discharge opening that measures between 10-100 mm in length and 0.5-5 mm in width. The design incorporates a dispensing chamber positioned upstream of the discharge opening, along with a liquid distribution chamber that is in fluid communication with the dispensing chamber. The reduction section of the nozzle body is crucial, as it has a cross-sectional area that is at least 20% less than that of the discharge opening and the liquid distribution chamber.

Another significant patent involves a liquid composition for wet etching, which demonstrates improved selectivity for polysilicon over silicon dioxide. This composition is particularly effective even when the polysilicon is heavily doped or when the silicon dioxide is a low-temperature oxide. The formulation includes 0.05-0.4 percent by weight hydrofluoric acid, 15-40 percent by weight nitric acid, 55-85 percent by weight sulfuric acid, and 2-20 percent by weight water. The patent also outlines a method and apparatus for utilizing this composition in wet etching processes.

Career Highlights

Stefan Detterbeck is currently employed at Lam Research AG, a company known for its advanced semiconductor manufacturing equipment. His role at Lam Research AG allows him to apply his innovative ideas and contribute to the development of cutting-edge technologies in the semiconductor industry.

Collaborations

Detterbeck has collaborated with notable colleagues such as Thomas Passegger and Bhaskar Bandarapu. These collaborations have likely enriched his work and contributed to the successful development of his patents.

Conclusion

Stefan Detterbeck's contributions to the field of technology through his patents and work at Lam Research AG highlight his innovative spirit and dedication to advancing semiconductor processes. His inventions, particularly in liquid dispensing and etching, showcase the potential for practical applications in the industry.