Stanford P Kohan

Title: Stanford P. Kohan: Innovator in Semiconductor Plasma Technology

Introduction

Stanford P. Kohan is a prominent inventor based in Garland, TX, known for his advancements in semiconductor plasma technology. With two patents to his name, he has made significant contributions to the field, enhancing processes involved in semiconductor manufacturing. His work exemplifies innovation aimed at improving efficiency and safety in complex technologies.

Latest Patents

Stanford's latest patents include the "Automated Single Slice Cassette Load Lock Plasma Reactor" and the "Automated Single Slice Powered Load Lock Plasma Reactor." The former patent discloses a plasma etch system designed to process one slice at a time. This system features an entry load lock, an exit load lock, a main chamber, and various components such as vacuum pumps and RF power supplies. The innovative design allows for a cassette of semiconductor wafers to be processed with reduced particulate contamination and enhances operator safety by managing hazardous gases.

The latter patent focuses on a plasma reactor that facilitates the manufacturing of semiconductor devices with pre-etch and post-etch treatments. This system includes powered load locks and utilizes articulated mechanical arms for efficient wafer handling. By streamlining processing steps and maintaining a controlled environment, Kohan's invention significantly improves the overall fabrication process.

Career Highlights

Stanford P. Kohan is employed at Texas Instruments Corporation, a leading company in the semiconductor industry. His role has enabled him to play a vital part in the technological advancements within the company, contributing to improved manufacturing processes through his innovative inventions.

Collaborations

During his career, Kohan has collaborated with esteemed colleagues such as Cecil J. Davis and John E. Spencer. These partnerships have likely fostered an environment of shared knowledge and innovation, essential for driving progress in their field.

Conclusion

Through his inventive spirit and contributions to semiconductor technology, Stanford P. Kohan stands out as a key figure in the industry. His patents not only enhance production efficiency but also prioritize safety in semiconductor manufacturing. As technology continues to evolve, Kohan's innovations will likely play a significant role in shaping the future of the semiconductor landscape.