This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Applied Materials, Inc.. Active years: 2023.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2023
Title: Innovations of Sri Thirunavukarasu in Semiconductor Technology
Introduction
Sri Thirunavukarasu is a notable inventor based in Singapore, known for his contributions to semiconductor technology. He has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor manufacturing processes. His work is particularly significant in the area of electrostatic chucks used in wafer processing.
Latest Patents
Sri Thirunavukarasu holds 1 patent for his invention titled "Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation process." This patent describes electrostatic chucks designed to minimize current leakage while improving methods for dicing semiconductor wafers. The invention includes an etch apparatus with a chamber and a plasma source, along with an electrostatic chuck featuring a conductive pedestal with notches and corresponding lift pins.
Career Highlights
Sri Thirunavukarasu is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His role involves developing advanced technologies that support the semiconductor industry. His innovative approach has contributed to the company's reputation for excellence in manufacturing equipment.
Collaborations
Some of his coworkers include Sai Abhinand and Michael Sorensen, who collaborate with him on various projects within the company. Their teamwork fosters an environment of innovation and creativity, leading to significant advancements in semiconductor technology.
Conclusion
Sri Thirunavukarasu's work exemplifies the spirit of innovation in the semiconductor industry. His patent on electrostatic chucks demonstrates his commitment to improving manufacturing processes. His contributions are vital to the ongoing evolution of semiconductor technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile