Sree Rangasai Kesapragada

Title: Sree Rangasai Kesapragada: Innovator in Physical Vapor Deposition Technologies

Introduction

Sree Rangasai Kesapragada is a notable inventor based in Union City, CA (US). He has made significant contributions to the field of physical vapor deposition (PVD) technologies. With a total of 4 patents to his name, his work has advanced the capabilities of material deposition processes in semiconductor manufacturing.

Latest Patents

Among his latest patents is a method and apparatus for asymmetric selective physical vapor deposition. This innovative method involves providing a stream of a first material from a PVD source at a non-perpendicular angle to the substrate surface. The process includes directing the material through a collimator to limit the angular range, allowing for precise deposition on specific features of the substrate. Another significant patent focuses on depositing cobalt in a feature, particularly within a word line of a 3D NAND device. This method enhances the quality of the cobalt layer by utilizing a two-temperature process to ensure optimal deposition and annealing.

Career Highlights

Sree Rangasai Kesapragada is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has positioned him as a key player in the development of advanced deposition techniques that are crucial for modern electronics.

Collaborations

Throughout his career, Sree has collaborated with talented individuals such as Xianmin Tang and Jin Hee Park. These collaborations have fostered innovation and have contributed to the successful development of his patented technologies.

Conclusion

Sree Rangasai Kesapragada's contributions to the field of physical vapor deposition are noteworthy and impactful. His innovative methods and collaborative efforts continue to shape the future of semiconductor manufacturing.