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Title: Sonoko Tohda: Innovator in Semiconductor Technology
Introduction
Sonoko Tohda is a prominent inventor based in Higashimurayama, Japan. She has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. Her work has been instrumental in advancing the methods used in semiconductor integrated circuit devices.
Latest Patents
One of her latest patents involves a semiconductor integrated circuit device and the method for making the same. The method includes several steps: first, depositing a first underlying film made of titanium nitride on an insulating film with multiple through-holes. Next, a tungsten film is deposited on the first underlying film, which is then etched back using a fluorine-containing plasma, leaving the tungsten film only in the connection holes. Following this, the surface of the first underlying film is sputter etched to remove any fluorine residue. Finally, an aluminum film is formed on the first underlying film. This innovative method enhances the efficiency and effectiveness of semiconductor devices.
Career Highlights
Throughout her career, Sonoko Tohda has worked with notable companies, including Hitachi, Ltd. Her expertise in semiconductor technology has positioned her as a key figure in the industry.
Collaborations
She has collaborated with esteemed colleagues such as Masayuki Suzuki and Shinji Nishihara, contributing to various projects that have furthered the field of semiconductor technology.
Conclusion
Sonoko Tohda's contributions to semiconductor technology through her innovative patents and collaborations highlight her importance as an inventor. Her work continues to influence the development of advanced semiconductor devices.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.