Sm Reza Sadjadi

Title: Innovations of Sm Reza Sadjadi

Introduction

Sm Reza Sadjadi is an accomplished inventor based in Saratoga, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work primarily focuses on methods for etching dielectric layers, which are crucial in the manufacturing of electronic components.

Latest Patents

One of his latest patents is titled "Mask trimming." This patent describes a method for etching a dielectric layer by forming a patterned mask with isolated and dense areas of mask features. The mask is trimmed through multiple cycles, which include depositing a deposition layer and selectively etching both the deposition layer and the patterned mask. This selective etching process allows for the trimming of isolated areas of the mask relative to the dense areas, ultimately leading to the etching of the dielectric layer.

Another notable patent is "Critical dimension reduction and roughness control." This invention outlines a method for forming features in an etch layer by first creating a photoresist layer over the etch layer. The photoresist layer is then patterned to form features with sidewalls. A control layer is applied over the photoresist layer and the bottoms of the features, followed by the deposition of a conformal layer to reduce the critical dimensions of the photoresist features. The features are then etched into the etch layer using a different etch chemistry, ensuring that the control layer is more resistant to etching than the conformal layer.

Career Highlights

Sm Reza Sadjadi is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His innovative work has contributed to advancements in etching technologies, which are essential for the production of high-performance electronic devices.

Collaborations

Throughout his career, Sm Reza Sadjadi has collaborated with talented individuals such as Jisoo Kim and Sangheon Lee. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies.

Conclusion

Sm Reza Sadjadi's contributions to the field of semiconductor technology through his patents and collaborations highlight his role as a significant innovator. His work continues to influence the industry and pave the way for future advancements in electronic manufacturing.