This inventor holds 3 USPTO granted patents and 1 published patent application and 1 EPO patent. Top assignee: Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno. Active years: 2013-2022.
Location History:
- s-Gravenhage, NL (2019)
- Alphen aan den Rijn, NL (2013 - 2022)
Company Filing History:
Years Active: 2013-2022
Title: Sjoerd Oostrom: Innovator in Optical Inspection Technologies
Introduction
Sjoerd Oostrom is a notable inventor based in Alphen aan den Rijn, Netherlands. He has made significant contributions to the field of optical inspection technologies, holding a total of 3 patents. His work focuses on developing innovative methods and devices for inspecting surfaces and removing contaminants.
Latest Patents
One of Sjoerd's latest patents is an optical inspection device and method. This device is designed to inspect a planar object surface for the presence of particles and defects. It utilizes a light source that supplies light to the object surface at a grazing angle. An image sensor captures light scattered from particles and defects on the surface. The optical axis of the objective is positioned at non-zero angles relative to the normal of the surface, allowing for effective detection of specular reflections. The configuration of the detection surface and optical axis follows a Scheimpflug arrangement, enhancing the device's performance.
Another significant patent involves a method for removing particulate contaminants from the backside of a wafer or reticle. This invention includes a cleaning substrate that features protrusions and a tacky layer. The method involves contacting the backside of the wafer or reticle with the protrusions while maintaining a precise distance from the tacky layer, which is crucial for effective cleaning.
Career Highlights
Sjoerd Oostrom is affiliated with the Netherlands Organization for Applied Scientific Research (TNO), where he applies his expertise in developing advanced optical inspection technologies. His work has been instrumental in enhancing the efficiency and effectiveness of surface inspections in various applications.
Collaborations
Sjoerd has collaborated with notable colleagues, including Antonius Maria Bernardus Van Mol and Harmannus Franciscus Maria Schoo. These collaborations have contributed to the advancement of technologies in their respective fields.
Conclusion
Sjoerd Oostrom's innovative contributions to optical inspection technologies demonstrate his commitment to advancing the field. His patents reflect a deep understanding of the challenges in surface inspection and cleaning, positioning him as a key figure in this area of research.