Company Filing History:
Years Active: 2020-2024
Title: Siqing Lu: Innovator in Plasma Processing Technology
Introduction
Siqing Lu is a prominent inventor based in Seongnam-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 5 patents. His work focuses on advanced plasma processing technologies that are essential for the production of semiconductor devices.
Latest Patents
Siqing Lu's latest patents include innovative technologies that enhance semiconductor manufacturing processes. One of his notable inventions is a plasma processing apparatus and method of manufacturing semiconductor devices using the same. This apparatus features a process chamber and a substrate support chuck designed to support a substrate, incorporating upper and lower cooling channels that are symmetrically separated. Additionally, it includes a support chuck temperature controller that supplies different coolants to the respective channels.
Another significant patent is for an electrostatic chuck and wafer etching device. This device includes a fixing plate for securing a wafer, an electrostatic plate that generates an electrostatic force to hold the wafer in place, and multiple heating elements that allow for localized temperature control of the electrostatic plate. A cooling plate is also integrated to manage heat emitted by the heating elements.
Career Highlights
Siqing Lu is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the semiconductor field. His work has been instrumental in advancing technologies that improve the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Siqing Lu has collaborated with notable colleagues, including Cheonkyu Lee and Takafumi Noguchi. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Siqing Lu's contributions to plasma processing technology and semiconductor manufacturing are noteworthy. His innovative patents and collaborations reflect his commitment to advancing the field, making him a significant figure in the industry.
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