Company Filing History:
Years Active: 2004
Title: Silke Paul - Innovator in Thermal Treatment Technology
Introduction
Silke Paul is a prominent inventor based in Ulm, Germany. She has made significant contributions to the field of thermal treatment technology, particularly in the context of semiconductor manufacturing. Her innovative approach has led to advancements that enhance the efficiency and control of thermal processes.
Latest Patents
Silke Paul holds a patent for a "Method and device for thermally treating objects." This invention focuses on improving the control of temperature profiles during the thermal treatment of objects, specifically semiconductor wafers. The method utilizes a heating system that allows for precise temperature progression, employing PID control and feedforward control based on a simulation model of the heating system and the object. This model consists of individual components, and the parameters are monitored and adapted during the thermal treatment process.
Career Highlights
Silke Paul is associated with Mattson Thermal Products GmbH, where she has been instrumental in developing innovative thermal treatment solutions. Her work has positioned the company as a leader in the semiconductor industry, particularly in rapid heating systems.
Collaborations
Throughout her career, Silke has collaborated with notable colleagues, including Werner Blersch and Jochen Urban. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Silke Paul's contributions to thermal treatment technology exemplify her dedication to innovation in the semiconductor field. Her patent and work at Mattson Thermal Products GmbH highlight her role as a key figure in advancing thermal treatment methods.