Company Filing History:
Years Active: 2021
Title: Sihong Zhai: Innovator in Exposure Technology
Introduction
Sihong Zhai is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of exposure technology, particularly through his innovative patent that enhances exposure performance.
Latest Patents
Sihong Zhai holds 1 patent for an exposure apparatus and method. This invention includes a control system, light source system, multiple illumination systems, and several projection objective lenses. The light source system is designed to emit a variety of first illumination beams that interact with the illumination systems. Each illumination system is equipped with a variable attenuator and a branch energy detector. The branch energy detector measures the illuminance level of a second illumination beam produced in the corresponding illumination system and relays this information back to the control system. The control system then adjusts the illuminance levels of the second illumination beams in each illumination system by managing the respective variable attenuators. This innovative exposure apparatus and method significantly improve exposure performance, allowing for finer and faster energy adjustments, which leads to precise control and higher exposure accuracy.
Career Highlights
Sihong Zhai is associated with Shanghai Micro Electronics Equipment (Group) Co., Ltd., where he applies his expertise in developing advanced exposure technologies. His work has been instrumental in pushing the boundaries of what is possible in the field of microelectronics.
Collaborations
Sihong Zhai collaborates with Jun Qian, a fellow innovator in the industry. Their combined efforts contribute to the advancement of exposure technologies and the development of new solutions.
Conclusion
Sihong Zhai is a key figure in the realm of exposure technology, with a focus on improving exposure performance through innovative methods and apparatuses. His contributions are paving the way for advancements in microelectronics and related fields.