Sigmund A Koenigseder

Title: Sigmund A. Koenigseder: Innovator in Semiconductor Technology

Introduction

Sigmund A. Koenigseder is a notable inventor based in San Antonio, TX (US). He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work primarily focuses on improving the performance and reliability of integrated circuits.

Latest Patents

One of his latest patents involves the formation of titanium boride and titanium silicide contact barriers. This innovative process utilizes low-pressure chemical-vapor deposition to ensure excellent step coverage over integrated circuit structures. A rapid thermal anneal is performed in an ambient that includes diborane, facilitating the interaction of titanium with underlying silicon to form titanium silicide. Concurrently, diborane reacts with titanium to create titanium boride, resulting in a composite barrier layer. This layer is crucial as it prevents aluminum from migrating into silicon while lowering the contact resistivity associated with the barrier layer. The close match of thermal coefficients of expansion for titanium boride and silicon ensures high thermal stability.

Another significant patent addresses the densification of intermetal dielectric films. This improved anneal process is particularly beneficial for preparing dielectric layers. An oxide layer is deposited using a H₂O-TEOS PECVD process, followed by a vacuum bake to eliminate volatile impurities. An oxidation anneal is then performed to scavenge any remaining undesirable species and to densify the dielectric layer.

Career Highlights

Sigmund A. Koenigseder has been associated with VLSI Technology, Inc., where he has played a pivotal role in advancing semiconductor technologies. His innovative approaches have contributed to the development of more efficient and reliable electronic devices.

Collaborations

Throughout his career, Koenigseder has collaborated with esteemed colleagues, including Chang-Ou Lee and Landon B. Vines. These collaborations have further enhanced the impact of his work in the semiconductor industry.

Conclusion

Sigmund A. Koenigseder's contributions to semiconductor technology through his patents and collaborations have significantly advanced the field. His innovative approaches continue to influence the development of integrated circuits and electronic devices.